| 蔡昌宗， 宋芳.基于位姿调整的晶圆传输机器人轨迹规划[J].轻工机械,2019,37(1):61-64 |
| 基于位姿调整的晶圆传输机器人轨迹规划 |
| Trajectory Planning of Wafer Transfer Robot Based on Pose Adjustment |
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| DOI：10.3969/j.issn.1005 2895.2019.01.011 |
| 中文关键词: 晶圆传输机器人 末端执行器 轨迹规划 S曲线 算法仿真 |
| 英文关键词:wafer transfer robot end effector trajectory planning S curve algorithm simulation |
| 基金项目:国家青年科学基金项目“基于微结构阵列的高摩擦低粘附晶圆高效传输机理与主动控制方法的研究”（51505273）。 |
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| 中文摘要: |
| 为了提高晶圆传输机器人的运行效率和运动平稳性，课题组基于末端执行器的位姿调整对晶圆传输机器人进行了轨迹规划研究。首先，介绍了晶圆传输实验平台的机构组成，在此基础上采用了动静法对晶圆受力进行分析，得出加速度与位姿角度之间的内在关系；其次，提出了一种基于位姿调整的S曲线加减速控制算法，并基于该算法实现了对末端执行器的轨迹规划；最后，采用MATLAB软件编程，实现了关键参数的求解和算法仿真，得到了加速度、速度、位移随时间变化的曲线图。应用结果表明此轨迹规划可以在保证高度运动平稳的情况下提高晶圆传输机器人的工作效率。 |
| 英文摘要: |
| In order to improve the operating efficiency and smoothness of the wafer transfer robot, the trajectory planning of the wafer transfer robot was studied based on the pose adjustment of the end effector. Firstly, the mechanism composition of the wafer transfer experimental platform was introduced. Based on this, The force of the wafer was analyzed by using dynamic static method. Then the internal relationship between acceleration and pose angle was obtained. Secondly, a S curve acceleration and deceleration control algorithm based on pose adjustment was proposed. Based on the algorithm, the trajectory planning of the end effector was realized. Finally, MATLAB programming was used to solve the key parameters and simulate the algorithm. Meanwhile, time history plots of acceleration, velocity and displacement were obtained. The application results show that this trajectory planning can improve the working efficiency of the wafer transfer robot under the condition of ensuring high motion stability. |
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