| 王玉松， 江亮， 钱林茂.过氧化氢对轴承钢化学机械抛光性能的影响[J].轻工机械,2019,37(5):1-5 |
| 过氧化氢对轴承钢化学机械抛光性能的影响 |
| Effect of Hydrogen Peroxide on Chemical Mechanical Polishing Performance of Bearing Steel |
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| DOI：10.3969/j.issn.1005 2895.2019.05.001 |
| 中文关键词: 化学机械抛光 轴承钢 过氧化氢 超精密 |
| 英文关键词:chemical mechanical polishing bearing steel hydrogen peroxide ultra precision |
| 基金项目:国家自然科学基金青年科学基金项目：面向超光滑、低损伤轴承钢表面的化学机械抛光机理研究（51605396）。 |
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| 中文摘要: |
| 为了获取高完整性轴承钢表面，课题组采用化学机械抛光技术对轴承钢进行超精密加工；研究了过氧化氢对轴承钢化学机械抛光性能的影响以及材料去除机理。实验结果表明：在乙二胺四乙酸二钾盐存在的条件下，随着过氧化氢质量分数增加，轴承钢的抛光速率先急剧增大，然后逐渐减小并趋于稳定；而静态腐蚀速率先急剧减小然后趋于稳定；表面粗糙度Ra先急剧降低然后趋于稳定。结合电化学实验和X射线光电子能谱实验结果，轴承钢的材料去除机理描述如下：当过氧化氢质量分数较低时，轴承钢表面生成一层强度低、容易去除的反应层，包括铁氧化物和铁离子的乙二胺四乙酸络合物，抛光速率高；当过氧化氢质量分数超过0.05%转折点并逐渐增加时，铁氧化物向三价态转变，表面反应层变得致密，强度增大，抛光速率减小，表面粗糙度降低。 |
| 英文摘要: |
| In order to obtain a high integrity bearing steel surface, chemical mechanical polishing technology was adopted to carry out the ultra precision machining of bearing steel. The influence of hydrogen peroxide on the chemical mechanical polishing performance of bearing steel and the material removal mechanism were studied. The experimental results show that in the presence of EDTA dipotassium salt, with the increase in the hydrogen peroxide mass fraction, the polishing rate of bearing steel first increases sharply, then gradually decreases and finally tends to stabilize; the static corrosion rate first decreases sharply and then tends to be stable; the surface roughness Ra first decreases sharply and then tends to be stable. Combined with the results of electrochemical experiments and X ray photoelectron spectroscopy, the material removal mechanism of bearing steel is described as follows: When the hydrogen peroxide mass fraction is low, a low strength and easily removable reaction layer which contains iron oxide and iron EDTA complex is formed on the surface of bearing steel, and the polishing rate is high; When the hydrogen peroxide mass fraction exceeds the 0.05 wt% turning point and gradually increases, the iron oxide changes to the trivalent state, the surface reaction layer becomes denser and stronger, the polishing rate decreases, the surface roughness decreases. |
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