| 沈小伟1， 赵万芹1,2*， 刘昊栋.蓝宝石飞秒激光直冲孔加工研究[J].轻工机械,2022,40(3):85-88 |
| 蓝宝石飞秒激光直冲孔加工研究 |
| Research on Sapphire Femtosecond Laser Straight Punching Processing |
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| DOI：10.3969/j.issn.1005 2895.2022.03.014 |
| 中文关键词: 飞秒激光 蓝宝石 直冲加工 单脉冲能量 重复频率 |
| 英文关键词:femtosecond laser sapphire percussion drilling single pulse energy repetition frequency |
| 基金项目:国家自然科学基金（21703137）。 |
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| 中文摘要: |
| 为了在电子衬底蓝宝石表面加工多种尺寸的微孔结构，课题组采用飞秒激光直冲方式进行蓝宝石表面微孔加工，通过实验探索了激光脉冲数、单脉冲能量和重复频率对孔直径和孔表面形貌的影响规律。研究结果表明：在不同单脉冲能量下，孔径均在脉冲数为50 000左右达到饱和；孔径均随着单脉冲能量和重复频率的增加而增加；飞秒激光加工蓝宝石孔口周围均无喷溅物，主要的缺陷为孔口裂纹，且裂纹数量和尺寸普遍表现为随激光加工参数的增大而增大。 |
| 英文摘要: |
| In order to process microporous structures of various sizes on the surface of sapphire on electronic substrate, femtosecond laser straight punching was used to process micropores on the surface of sapphire. The effects of laser pulse number, single pulse energy and repetition frequency on hole diameter and hole surface morphology were explored through experiments. The results show that the aperture alway reaches saturation under different single pulse energy when the number of pulses is about 50 000; the aperture increases with the increase of single pulse energy and repetition frequency. There is no splash around the sapphire hole in femtosecond laser processing, and the main defect is the hole crack. The number and size of cracks generally increase with the increase of laser processing parameters. |
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