| 苗杨杨, 陈永当*, 张娅婕, 杨磊, 毛勃越.基于银粉 碳纳米管 石墨烯复合压敏材料的柔性压阻传感器[J].轻工机械,2025,43(2):91-97 |
| 基于银粉 碳纳米管 石墨烯复合压敏材料的柔性压阻传感器 |
| Flexible Piezoresistive Sensors Based on Silver Flake Carbon Nanotube Graphene Composite Pressure Sensitive Materials |
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| DOI:10.3969/j.issn.1005 2895.2025.02.012 |
| 中文关键词: 柔性压阻传感器 聚二甲基硅氧烷 碳纳米管 石墨烯 压敏层 拓印法 |
| 英文关键词:flexible piezoresistive sensors PDMS(Polydimethylsiloxane) carbon nanotube graphene pressure sensitive layer embossing technique |
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| 中文摘要: |
| 为了提高压阻传感器的传感性能,课题组开发了一种高灵敏度柔性压阻传感器。采用银粉、碳纳米管和石墨烯复合材料为导电材料,以聚二甲基硅氧烷(Polydimethylsiloxane,PDMS)为基底,利用溶液法和拓印技术制备压敏层,又利用物理气相沉积(Physical Vapor Deposition,PVD)技术在聚萘二甲酸乙二醇酯(Polyethylene Naphthalate,PEN)薄膜上制备叉指电极,进而将压敏层和叉指电极进行组装,获得柔性压阻传感器。该传感器在多种压强条件下均表现出较快的响应速度、卓越的稳定性和出色的重复性,并且具备优良的柔韧性和耐用性;在静态和动态压强检测中均表现出卓越的性能,能够准确记录压强变化。该传感器在智能机器人技术等领域具有较大应用潜力。 |
| 英文摘要: |
| To enhance the sensing performance of piezoresistive sensors, a highly sensitive flexible piezoresistive sensor was developed. This sensor utilizes a composite material of silver flake, carbon nanotube, and graphene with Polydimethylsiloxane (PDMS) to form a pressure sensitive sensitive layer. The sensitive layer was prepared using solution casting and soft lithography techniques. Interdigital electrodes were fabricated on Polyethylene Naphthalate (PEN) film using Physical Vapor Deposition (PVD) technology. Subsequently, the sensitive layer and interdigital electrodes were assembled to obtain the flexible piezoresistive sensor. This sensor exhibited rapid response, excellent stability, and remarkable repeatability under various pressure conditions, and it also possessed good flexibility and durability. Experimental results also demonstrate that the sensor performs exceptionally well in both static and dynamic pressure detection, accurately recording changes in pressure. The sensor holds significant potential for applications in the field of intelligent robotics and other areas. |
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