| 毛哲辰1， 陈宁2， 郭钢祥2， 陈旭雯3， 祖洪飞1*.基于低相干干涉的小孔内表面几何尺寸及三维形貌测量系统[J].轻工机械,2025,43(3):62-68 |
| 基于低相干干涉的小孔内表面几何尺寸及三维形貌测量系统 |
| Measurement System of Geometric Dimensions and Three Dimensional Morphology of Small Hole Inner Surface |
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| DOI：10.3969/j.issn.1005 2895.2025.03.009 |
| 中文关键词: 测量系统 三维形貌 低相干干涉 小孔内表面 微型光纤探针 三维重建 |
| 英文关键词:measurement system three dimensional morphology low coherence interference small hole inner surface microfiber probe three dimensional reconstruction |
| 基金项目:国家重点研发计划项目（2022YFF0606003）；浙江省市场监督管理局科技计划（ZC2023017）；浙江省市场监督管理局科技计划（ZD2024011）；国家市场监督管理总局科技计划（2024MK047）。 |
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| 中文摘要: |
| 针对目前小孔内表面检测困难的问题，课题组基于低相干干涉测量原理搭建了一套小孔内表面几何尺寸及三维形貌测量系统。测量系统主要包括扫频光源、光电探测器、数据采集设备、参考臂和样品臂等，并提出了用于小孔内表面测量的微型光纤探针设计方案；通过实验对系统进行验证，并进一步通过三维重建复原了选择性激光熔化[JP2]（Selective Laser Melting，SLM）打印小孔零件的内表面形貌。结果表明：该测量系统可以实现小孔内表面的高精度几何尺寸测量，以标准环规为测量对象得到其测量扩展不确定度为4.454 μm；重建的三维模型可清晰地看出打印材料颗粒与颗粒堆积缺陷。 |
| 英文摘要: |
| Aiming at the current difficulty of detecting small hole inner surface, the research group built a system of measuring the geometry and three dimensional morphology for small hole inner surface based on the principle of low coherence interferometry. The measurement system mainly included a swept frequency light source, a photoelectric detector, a data acquisition device, a reference arm and a sample arm and so on. A design scheme of a microfiber probe for small hole inner surface measurements were proposed. The system was verified by experiments, and the inner surface morphology of the small hole parts printed by Selective Laser Melting (SLM) was further restored by three dimensional reconstruction. The results show that the measurement system could achieve high precision geometric size measurement of small hole inner surface, and the measurement extension uncertainty is 4.454 μm with a standard ring gauge as the measurement object. The reconstructed three dimensional model can clearly show the particles and particle stacking defects of the printed material. |
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