| 苏记华，苏鹏志，贾礼礼，李清源.溢流法熔制低厚度偏差LTPS/OLED玻璃的关键技术[J].轻工机械,2025,43(5):68-76 |
| 溢流法熔制低厚度偏差LTPS/OLED玻璃的关键技术 |
| Key Technologies for Melting Low Thickness Deviation LTPS/OLED Glass by Overflow Method |
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| DOI：10.3969/j.issn.1005 2895.2025.05.009 |
| 中文关键词: 玻璃熔制 溢流下拉法 低温多晶硅 有机发光二极管 厚度偏差 |
| 英文关键词:glass melting overflow downward method LTPS(Low Temperature Poly Silicon) OLED (Organic Light Emitting Diode) thickness deviation |
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| 中文摘要: |
| 针对低温多晶硅/有机发光二极管(Low Temperature Poly Silicon/Organic Light Emitting Diode，LTPS/OLED)玻璃基板厚度偏差控制难题，笔者研究了溢流下拉法中熔融玻璃性能、溢流砖结构、温度场及拉引工艺对厚度均匀性的影响机制，提出了熔体性能调控、溢流砖结构优化、温度场精密控制及拉引稳定性强化的集成方案。中试结果显示：优化后玻璃基板厚度标准差由2.8 μm降至0.9 μm，最大厚度偏差降至±2.0 μm以内，过程能力指数CPK达1.58，为超低厚度偏差显示玻璃制造提供技术范式，推动国产高端基板自主化。 |
| 英文摘要: |
| Aiming at the problem of controlling the thickness deviation of LTPS/OLED glass substrates, the influence mechanisms of the properties of molten glass, the structure of the overflow brick, the temperature field and the drawing process on the thickness uniformity in the overflow down drawing method were studied. An integrated scheme for regulating melt properties, optimizing the structure of overflow bricks, precisely controlling the temperature field and strengthening tensile stability was proposed. The pilot test results show that the standard deviation of the optimized glass substrate thickness has decreased from 2.8 μm to 0.9 μm, with a maximum thickness deviation within ±2.0 μm and a Process Capability Index(CPK) of 1.58. This provides a technical paradigm for the manufacturing of ultra low thickness deviation display glass and promotes the autonomy of domestic high end substrates. |
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